Microelectronics has facilitated the development of sensor technology for decades. Therefore, the whole industry must establish a sense of innovation, vigorously strengthen the development of new sensors, improve the cost performance of products, accelerate the transformation of scientific research results, accelerate the industrialization of new sensors, and rapidly increase the market share of domestic sensors.
At present, China's sensor industry is small in scale and has a narrow application range. To this end, we urgently need to change the concept and transform the development of sensors from the development of a single physical sensor to the development of a highly integrated new sensor. The development and application of new sensors has become the core and key of modern systems, and it will become a new economic growth point of the information industry in the 21st century. There are nearly 6,000 varieties and specifications.
China began to get involved in the sensor manufacturing industry as early as the 60s of the 20th century. In 1972, China established the first batch of piezoresistive sensor development and production units; In 1974, the practical piezoresistive pressure sensor was successfully developed; In 1978, solid-state piezoresistive accelerometers were born; In 1982, China first began the research of silicon micromechanical system (MEMS) processing technology and SOI (silicon on insulator) technology.